TY  - BOOK
AU  - Suzuki,Kazuaki
AU  - Smith,Bruce W.
TI  - Microlithography: science and technology 
T2  - Optical science and engineering
SN  - 9781420051537 (ebook : PDF)
PY  - 2007///
CY  - Boca Raton
PB  - CRC Press
KW  - Microlithography
KW  - Industrial applications
KW  - Integrated circuits
KW  - Masks
KW  - Metal oxide semiconductors, Complementary
KW  - Design and construction
KW  - Manufacturing processes
KW  - Electronic books
KW  - lcsh
N1  - Includes bibliographical references and index; Also available in print edition; CRC Press (http://www.crcpress.com)
UR  - http://marc.crcnetbase.com/isbn/9781420051537
ER  -