Nanoparticle engineering for chemical-mechanical planarization [electronic resource] : fabrication of next-generation nanodevices / authors, Ungyu Paik, Jea-Gun Park.
Material type:
Item type | Current library | Call number | Status | Date due | Barcode |
---|---|---|---|---|---|
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Mysore University Main Library | Not for loan | EBCP00678 |
"A CRC title."
Includes bibliographical references and index.
Also available in print edition. CRC Press (http://www.crcpress.com)
Mode of access: World Wide Web.
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