Wellcome

Microlithography [electronic resource] : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.

Contributor(s): Suzuki, Kazuaki | Smith, Bruce W, 1959-Material type: TextTextSeries: Optical science and engineering (Boca Raton, Fla.) ; 126.Publication details: Boca Raton : CRC Press, c2007Edition: 2nd edDescription: 848 p. : illISBN: 9781420051537 (ebook : PDF)Subject(s): Microlithography -- Industrial applications | Integrated circuits -- Masks | Metal oxide semiconductors, Complementary -- Design and construction | Manufacturing processesGenre/Form: Electronic books.Additional physical formats: No titleOnline resources: Distributed by publisher. Purchase or institutional license may be required for access. Also available in print edition. CRC Press (http://www.crcpress.com)
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Item type Current library Call number Status Date due Barcode
Ebooks Ebooks Mysore University Main Library
Not for loan EBCP00638

Includes bibliographical references and index.

Also available in print edition. CRC Press (http://www.crcpress.com)

Mode of access: World Wide Web.

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